Numerical Simulation of Laser Induced Substrate Heating for Direct Write of Mesoscopic Integrated Conformal Electronics (MICE)
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Published:2000
Issue:
Volume:624
Page:
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ISSN:0272-9172
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Container-title:MRS Proceedings
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language:en
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Short-container-title:MRS Proc.
Author:
Lowry S.,Sheu J. C.,Stewart Robert,Parkhill Robert
Abstract
ABSTRACTA numerical tool is developed to simulate the optical and thermal interactions of selected lasers with precursors and substrates in support of the emerging technology for the direct write of Mesoscopic Integrated Conformal Electronics (MICE). The code couples the Discrete Ordinate Method (DOM) radiation model with the multi-physics computation fluid dynamics code CFD-ACE to predict the conductive and radiative heat transport in the processThis paper provides a brief overview of the numerical model. Selected simulations are presented including comparison with empirical data. The capabilities, limitations, and potential applications of the model with respect to MICE are discussed. Future model enhancements are proposed
Publisher
Springer Science and Business Media LLC
Subject
General Engineering