A New Development Of Scanning Hydrogen Imaging System And Its Application

Abstract

ABSTRACTScanning type electron-stimulated desorption (ESD) spectroscopy to detect hydrogen on solid surfaces has been described. To analyze a two-dimensional distribution of hydrogen on solid surface, a pencil-type fine-focused electron gun, of which spot size is less than 300 nm at 800 eV, has been developed using a thermal field emitter. The lateral resolution of analysis is achieved less than 1 μm.Letters were drawn on a hydrogen-terminated Si(100) surface by irradiation of continuous electron beam to remove hydrogen from the surface, and by the following scanning ESD measurement, a clear letters were confirmed on this surface. Direct lithography by an electron beam on silicon surfaces has been realized.