Titania/Silica Sol-Gel Films: Comparison of Techniques for Thin Film Thickness Measurement-Reference-Cited by-同舟云学术

Titania/Silica Sol-Gel Films: Comparison of Techniques for Thin Film Thickness Measurement

Published:1990 Issue: Volume:180 Page:
ISSN:0272-9172
Container-title:MRS Proceedings
language:en
Short-container-title:MRS Proc.

Author:

Melpolder S. M.,West A. W.,Cunningham M. P.,Sharma R.

Abstract

ABSTRACTTwo techniques for thin film measurement were compared: an optical method combining ellipsometry and reflectance spectroscopy, and cross-sectional transmission electron microscopy. These techniques were used to measure the absolute thicknesses of titania/silica sol-gel films in the size range 0.1 to 0.8 microns. The relative advantages and disadvantages of these methods will be described in this study.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

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