Thermal and Pressure Sensing by Chemoreceptive Neuron MOS Transistors (CνMOS) with PVDF Coating

Abstract

ABSTRACTThis paper reports the integration of poled 10μm +/- 1μm P(VDF-TrFe) copolymer thin films with an adapted non-volatile, foundry-compatible CMOS structure (CνMOS) for the potential purposes of in-vivo piezoelectric and pyroelectric sensing. This structure allows for direct, reliable interaction between the sensing transducer and the highly sensitive MOSET gate stack without the need for an external reference electrode or chopper, as other designs may require.