Author:
Arnó Josep,Farha Omar K.,Morris William,Siu Paul W.,Tom Glenn M.,Weston Mitchell H.,Fuller Patrick E.
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference8 articles.
1. K. Olander, A. Avila, Subatmospheric has storage and delivery: Past, present, and future. Solid State Technol. 57, 27–302 (2014)
2. Carruthers, J. D., US Patent 6,743,278 B1
3. A.J. Howarth, Y. Liu, P. Li, Z. Li, T.C. Wang, J.T. Hupp, O.K. Farha, Chemical, thermal and mechanical stabilities of metal–organic frameworks. Article Number:15018. https://doi.org/10.1038/natrevmats.2015.18
4. C. Scannell, E. Sturm, O. Byl, J. Despres, K. Murthi “Next Generation Safe Delivery Source® (SDS4®) Dopant Material Storage and Delivery Package” 22nd International Conference on ion Implantation (IIT), Würzburg, Germany, September (2018). DOI: https://doi.org/10.1109/IIT.2018.8807910
5. J. Arnó, O.K. Farha, W. Morris, P.W. Siu, G.M. Tom, M.H. Weston, P.E. Fuller, Evaluation ION-X® Dopant Gas Delivery System Performance Characterization at Axcelis. In: 22nd International Conference on ion Implantation (IIT), Würzburg, Germany, September (2018). https://doi.org/10.1109/IIT.2018.8807983
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献