Preparation and Characterization of Pb(Zr,Ti)O3 films prepared by a modified sol-gel route

Abstract

ABSTRACTPb(Zr0.53Ti0.47)O3 (PZT) films have been fabricated on stainless steel substrates by a Polyvinylpirrolidone (PVP) modified sol-gel route. The single layer of about 0.26 μm was achieved by using the PVP-modified PZT sol, and Crack-free PZT films with thickness of up to 2.37 μm were fabricated by repeating the deposition process. The variations in crystallite orientation, microstructure, dielectric and ferroelectric properties of PZT films were investigated as a function of film thickness. Our results indicate that PZT films prepared on stainless steel substrates maintain good dielectric and ferroelectric properties.