Multilayers and Multiturn Coils of YBaCuO/MgO/YBaCuO Layers Prepared by Multitarget Sputtering-Reference-Cited by-同舟云学术

Multilayers and Multiturn Coils of YBaCuO/MgO/YBaCuO Layers Prepared by Multitarget Sputtering

Published:1992 Issue: Volume:275 Page:
ISSN:0272-9172
Container-title:MRS Proceedings
language:en
Short-container-title:MRS Proc.

Author:

Wunderlich R.,Kleinitzke J.,Meyer B.,Müller J.

Abstract

ABSTRACTThe deposition of large area multilayers with smooth surfaces is an important topic for the realisation of high quality multiturn coils for flux transformers. We have developed a co-sputtering process from two metallic targets for the deposition of large areas of extremely smooth YBaCuO thin films. Conditions for epitaxial growth of MgO layers on YBaCuO have been investigated. Epitaxial multilayers with good electrical properties (Tc,o > 82 K) have been fabricated.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

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1. Ion-beam etching of substrate steps: SNS compared to step-edge grain boundary Josephson-junctions;Applied Superconductivity;1999-10

2. Fabrication of step-edge Josephson junctions for low-noise dc-SQUIDs;Superconductor Science and Technology;1998-11-01

3. SNS-DC-SQUIDs and flux transformers for integrated magnetometers in flip-chip technique;IEEE Transactions on Appiled Superconductivity;1995-06

4. Modeling of deposition and resputtering rate profiles in planar face to face sputtering systems;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1994-09