Crystallization Kinetics and Texture of Sol-Gel PZT Thin Films

Abstract

AbstractThe morphology and phase evolution of sol-gel PZT thin films during rapid thermal annealing are investigated by in situ recording of scattered light intensity measured in reflected mode and momentary patterns visualized by optical microscope. In addition the texture and fractions of growing phases and the angular dependence of the scattered light are studied in partly annealed films. The kinetic parameters characterizing the transition from pyrochlore to perovskite phase are extracted by mathematical treatment of experimental data. It is shown that the film's texture and the transformation kinetics strongly depend on pyrolysis temperature. A mechanism of texture formation is proposed.