Deposition of Dielectric Optical Coatings: A Microstructural Study of the Deposited Layers and Interfaces

Abstract

ABSTRACTThin dielectric films for optical applications are deposited on substrates using a variety of techniques including reactive sputtering, solgel reaction, and ion assisted plasma deposition. This transmission electron microscopy study characterizes optical coatings produced by the above deposition techniques and shows how changes in deposition conditions change microstructure and as a result the optical properties.