Author:
Kim Yoon-Gi,Bialy S.,Miller R.W.,Spencer J.T.,Dowben P.A.,Datta Saswati
Abstract
ABSTRACTWe have demonstrated that the selective area deposition of palladium on polyimide substrates is possible through the U.V. photolysis of (π-allyl)(π-cyclopentadienyl) palladium. This photolytic deposition process did not result in any apparent damage to either the Ultem 1000 (polyetherimide) or Kapton substrates (polyimide substrates). The resistivity of the palladium films (< 0.lum) suggests that the films are porous.
Publisher
Springer Science and Business Media LLC
Cited by
2 articles.
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