Catalytic Decomposition of Perfluorocompounds

Abstract

ABSTRACTIt is becoming increasingly important to decompose PFCs (Perfluorocompounds), which are powerful greenhouse gases. The process of catalytic decomposition is expected to be effective in operating at lower temperatures if catalysts of high activity and durability are developed. The decomposition activities of PFC with H2O was investigated using several catalysts. It was found that PFC decomposition activity was related to the reactivity of fluorine and the formation of mixed oxides. Using the catalyst we have developed, CF4 was decomposed with conversion above 99.9% over 1988h. Furthermore, another PFC was decomposed over the catalyst. The order of the conversion was CHF3 > CF4 > C2F6. The catalytic decomposition system can use the treatment of PFCs in dry etch process waste gas.