Synthesis and Characterization of Nitrogen Containing Diamondlike Carbon Films made by ion Beam Deposition

Abstract

ABSTRACTHydrogenated and nonhydrogenated nitrogen containing diamondlike carbon films (NDLC including a-C:N and a-C:N:H) were made in a dual ion beam deposition system. The asdeposited films were characterized by Raman spectroscopy, Rutherford backscattering spectroscopy (RBS) and elastic recoil detection analysis (ERD). The compositional stability of the films at temperatures up to 550°C was examined in situ by both RBS and ERD using a heated sample stage in the scattering chamber. The addition of nitrogen altered the Raman parameters when compared with conventional DLC. At elevated temperatures, the a-C:N films do not suffer nitrogen loss; however, the a-C:N:H films undergo nitrogen and hydrogen loss at 400°C.