Abstract
AbstractFor decades, nanoindentation has been used for measuring mechanical properties of films with the widely used assumption that if the indentation depth does not exceed 10% of the film thickness, the substrate influence is negligible. The 10% rule was originally deduced for much thicker metallic films on steel substrates and involved only the hardness measurement. Thus, the boundaries of usability for measuring thin film elastic modulus may differ. Two known material systems of Mo and MoTa thin films on Si substrates are examined with nanoindentation and numerical modeling to show the limitations in measuring elastic moduli. An assessment of the hardness and elastic modulus as a function of contact depth and accurate modeling of the film/substrate deformation confirms the 10% rule for hardness measurements. For elastic modulus, the indentation depths should be much smaller. Results provide a recommended testing protocol for accurate assessment of thin film elastic modulus using nanoindentation.
Graphical abstract
Funder
Österreichische Akademie der Wissenschaften
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference65 articles.
1. W.D. Nix, Mechanical properties of thin films. Metall. Trans. A. 20A, 2217–2245 (1989). https://doi.org/10.1146/annurev.ms.20.080190.002135
2. H. Bückle, Use of hardness test to determine other material properties, in The Science of Hardness Testing and Its Research Applications. ed. by J.H. Westbrook, H. Conrad (American Society for Metals, Metals Park, OH, 1973), pp. 453–494
3. D. Tabor, Hardness of Metals (Clarendon Press, Oxford, 1951)
4. J.R. Cahoon, W.H. Broughton, A.R. Kutzak, The determination of yield strength from hardness measurements. Metall. Trans. 2, 1979–1983 (1971). https://doi.org/10.1007/BF02913433
5. Z.H. Xu, D. Rowcliffe, Finite element analysis of substrate effects on indentation behaviour of thin films. Thin Solid Films 447–448, 399–405 (2004). https://doi.org/10.1016/S0040-6090(03)01071-X
Cited by
30 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献