Ion Emission During Low Fluence KrF Laser-Metal Interaction

Abstract

AbstractA KrF laser was used to produce ions from an aluminum surface. The threshold energy fluence was found to be ∼30 mJ/cm2 which was lower than similar studies on the ablation of metals. The measured threshold however, was of the same order of magnitude for atomic desorption from semiconductor surfaces. This process can be used to perform surface analysis without ablation damage.