Atomic Arrangements in Short period MO-GE Multilayers Determined by X-Ray Anomalous Scattering and EXAFS

Author:

Wilson Lane,Bienenstock Arthur

Abstract

ABSTRACTStudies of atomic arrangements in amorphous and crystalline, short period Mo-Ge multilayers using synchrotron radiation X-ray diffraction (transmission and reflection), supplemented by EXAFS, are described. Differential anomalous scattering and EXAFS were utilized to determine the environment of each species. Intermixing, as well as a BCC epitaxial Ge structure, are among the observed structural characteristics. A wide range of structural variations is present indicating that specification of the layer thicknesses or composition profile alone is insufficient for characterization of the multilayers.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

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4. Structural Transitions in Thin Films;Dekker Encyclopedia of Nanoscience and Nanotechnology, Second Edition - Six Volume Set (Print Version);2008-11-24

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