Study of Periodic Surface Nanostructures Using Coherent Grating X-Ray Diffraction (Cgxd)

Abstract

AbstractIt is shown that an x-ray interference phenomenon, Coherent Grating X-ray Diffraction (CGXD), can be used to study lateral nanostructure arrays on crystal surfaces and interfaces. Compared to Fraunhofer grating diffraction of visible light, x-ray grating diffraction contains information not only about geometric profiles of a surface, but also about the internal crystalline structures and lattice strain distributions in grating features. Grating diffraction patterns can also be measured in a white-beam Laue method using highly collimated polychromatic synchrotron radiation. This provides a way for parallel data collection and is useful in in-situ studies of structural evolution of nanostructure arrays.