Structural imperfections in CVD diamond films

Abstract

Microwave plasma assisted CVD diamond films have been studied by transmission electron microscopy. Cross-section TEM as well as plan-view TEM methods were used to investigate various structural defects formed in the films. It was found that diamond films contain a large number of stacking faults and twins which lie on the {111} planes in diamond. With an increase in methane concentration during the deposition process, the density of these defects increases and their dimensions become smaller. The tendency for forming these structural defects is of concern in developing tailored structures and properties of diamond films.