Author:
Rebouiliat J. P.,Michelutti B.,Souche Y.,Gavigan J. P.,Givord D.,Lienard A.
Abstract
ABSTRACTSeveral experiments have been carried out to characterize the laser ablation deposition of metallic thin films as a function of the various process parameters. Ablation thresholds have been investigated for Al, Cu and Au targets as a function of wavelength as well as the fluence dependence of ablation rate. The effect of electric fields on the particle component of the ablated material has been investigated. Measurements of the velocity distribution of these particles have also been carried out for Al, Cu and Au targets as a function of the laser parameters with a view to using a velocity filter to remove the particles from the ablated beam.
Publisher
Springer Science and Business Media LLC
Cited by
5 articles.
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