Inhomogeneity and Microstructure in e-Beam Evaporated ZrO2 Films

Abstract

ABSTRACTThin films of zirconium dioxide are deposited by e-beam evaporation on optically polished borosilicate crown glass. Two different oxygen partial pressures in the chamber are used. The optical properties of the films are characterized by ellipsometry. The influence of oxygen stoichiometry on the composition and microstructure of the material is investigated by polycrystalline X-ray diffraction for different film thicknesses. The films are found to be inhomogeneous, and a composition gradient (i.e. amorphous ⇔ tetragonal ⇔ monoclinic) is observed from the substrate to the surface. The oxygen partial pressure influences the growth of the films.