Analysis of depth profiles of sol-gel derived multilayer coatings by Rutherford backscattering spectrometry and by cross-sectional transmission electron microscopy1

Abstract

This paper describes the preparation and compositional analysis of multilayer thin-film coatings prepared using sol-gel techniques. Alternate layers were labeled with an iron tag, derived from hydrolyzed 1,1'-bis(triethoxysilyl)ferrocene. Iron-free layers were composed of SiO2 derived from hydrolyzed tetraethylorthosilicate (TEOS). Analyses of these systems were based on Rutherford Backscattering Spectrometry (RBS) and Cross-Sectional Transmission Electron Microscopy (XTEM). The depth profile of iron, measured by RBS, yielded thicknesses (1000–1600 Å) for the individual layers that could be verified independently by XTEM.