Spectroscopic Ellipsometry Characterization of La2Ti2O7 Thin Films

Abstract

ABSTRACTOptical properties of La2Ti2O7 thin films were investigated by spectroscopie ellipsometry and compared to those of bulk sintered ceramics. Thin films were prepared by pulsed laser deposition (PLD) from bulk targets. To separate the effects of thickness, porosity, and index of refraction on observed Ψ and δspectra in thin films, a Cauchy model for n vs. λ was developed from sintered samples, with known porosity. Assuming the effective bulk index of refraction followed the rule of mixtures, corrected models for La2Ti2O7 without porosity were used to determine thickness and porosity of thin films as a function of fabrication parameters such as laser energy, substrate material and temperature. Ellipsometry models were tested and refined through XRD, EDX, ESCA, and SEM.