Fabrication of Diamond-Like Carbon Emitter Patterns by Room-Temperature Curing Nanoimprint Lithography with PDMS Molds Using Polysiloxane-Reference-Cited by-同舟云学术

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Fabrication of Diamond-Like Carbon Emitter Patterns by Room-Temperature Curing Nanoimprint Lithography with PDMS Molds Using Polysiloxane

Published:2016-01-26 Issue:16 Volume:1 Page:1075-1080
ISSN:2059-8521
Container-title:MRS Advances
language:en
Short-container-title:MRS Advances

Author:

Kiyohara Shuji,Yoshida Shogo,Ishikawa Ippei,Harigai Toru,Takikawa Hirofumi,Watanabe Masahiko,Sugiyama Yoshinari,Omata Yukiko,Kurashima Yuichi

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Link

http://link.springer.com/content/pdf/10.1557/adv.2016.49.pdf

Reference8 articles.

1. I. Kleps, A. Angelescu, N. Samfirescu, A. Gil, A. Correia, Solid-State Electron., 45, 997 (2001).

2. G.A. Cirino, R.D. Mansono, P. Verdonck, R.G. Jasinevicius, L.G. Neto, Surf. Coat. Technol., 204, 18 (2010).

3. S.Y. Chou, P.R. Krauss, P.J. Renstrom, Appl. Phys. Lett., 67, 3114 (1995).

4. S. Kiyohara, S. Araki, Y. Kurashima, Y. Taguchi, Y. Sugiyama and Y. Omata, J. Mater. Sci. Mater. Electron., 22, 183 (2010).

5. M. Kamiya, H. Tanoue, H. Takikawa, M. Taki, Y. Hasegawa, and M. Kumagai, Vucuum, 83, 510 (2009).

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1. The development of a dynamic rubber balloon spring-based asymmetric photocurable imprint system;Optik;2020-01

2. Extreme-ultraviolet and electron beam lithography processing using water-developable resist material;Nanoengineering: Fabrication, Properties, Optics, and Devices XIV;2017-08-31

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