Author:
Nakano Shoichi,Tsuda Shinya,Tarui Hisaki,Takahama Tsuyoshi,Haku Hisao,Watanabe Kaneo,Nishikuni Masato,Hishikawa Yoshihiro,Kuwano Yukinori
Abstract
ABSTRACTAs a new preparation method for high-quality a-Si films, we have developed the super chamber, a separated UHV reaction chamber system. A low impurity concentration and excellent film properties were obtained by the super chamber. A conversion efficiency of 11.7% was obtained for an a-Si solar cell using a high-quality i-layer deposited by the super chamber, and a p-layer fabricated by a photo-CVD method.As a new material, amorphous superlattice structure films were fabricated by the photo-CVD method for the first time. Quantization effects and low damage to the interfaces were observed. Superlattice structure p-layer a-Si solar cells were fabricated for the first time, and a conversion efficiency of 10.5% was obtained.
Publisher
Springer Science and Business Media LLC
Reference2 articles.
1. (2) Takahama T. , Isomura M. , Tarui H. , Nakashima Y. , Tsuda S. , Nakano S. , Kuwano Y. : Proc. of the 46th Autumn Meeting of the Jpn. Soc. of Appl. Phys. lp-ZG-4, p. 747 (1985)
Cited by
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