From Intelligent Materials to Smart Sensors: a-Si:H Position Sensitive Detectors

Author:

Fortunato E.,Fernandes M.,Soares F.,Lavareda G.,Martins R.

Abstract

AbstractThis work presents the main static and dynamic performances showed by one dimensional thin film position sensitive detectors (ID TFPSD), based on a-Si:H technology, with a size of 80 mm × 5 mm. The results obtained show that the TFPSD is able to respond to light powers as low as 2μ W/cm2, presenting a detection accuracy, linearity and response frequency better than 10 gm, 2% and 2 KHz, respectively. These results are quite promising regarding the application of these sensors to a wide variety of optical inspection systems where continuous quality control is required.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

Reference6 articles.

1. On the position response of a position-sensitive detector (PSD) irradiated with multiple light beams

2. 5. Soares F. and Martins R. (private communication).

3. 2. Hamakawa Y. , in Proceedings of the Technical Digest of the 6th International Photovoltaic Conference (New Delhi, 1992), p. 3.

4. A New Linear Array Thin Film Position Sensitive Detector (LTFPSD) for 3D Measurements

5. 4. Fortunato E. , Ph.D Thesis, FCT-UNL, Portugal, 1995.

Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Thin Film Position Sensitive Detectors: From 1D to 3D Applications;Technology and Applications of Amorphous Silicon;2000

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