The Fabrication of Semiconductor Nanostructure Arrays on a Silicon Substrate Using an Anodized Aluminum Template

Abstract

AbstractWe have developed a nanogrowth technology for the fabrication of periodic arrays of semiconductor nanostructures on silicon that is currently being investigated for silicon based x-ray detectors. The semiconductor nanostructures are formed by chemical synthesis in pores of a template created by the anodization of aluminum on a silicon substrate. The use of the silicon substrate allows greater control over the aluminum thin film properties, better in situ monitoring of the pore formation process, and the direct integration of nanostructure arrays with conventional silicon technology.