Measuring Surface Energies of GaAs (100) and Si (100) by Three Liquid Contact Angle Analysis (3LCAA) for Heterogeneous Nano-BondingTM-Reference-Cited by-同舟云学术

Measuring Surface Energies of GaAs (100) and Si (100) by Three Liquid Contact Angle Analysis (3LCAA) for Heterogeneous Nano-BondingTM

Published:2018-07-10 Issue:57-58 Volume:3 Page:3403-3411
ISSN:2059-8521
Container-title:MRS Advances
language:en
Short-container-title:MRS Advances

Author:

Cornejo Christian E.,Bertram Michelle E.,Diaz Timoteo C.,Narayan Saaketh R.,Ram Sukesh,Kavanagh Karen L.,Herbots Nicole,Day Jack M.,Ark Franscesca J.,Dhamdhere Ajit,Culbertson Robert J.,Islam Rafiqul

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Link

http://link.springer.com/content/pdf/10.1557/adv.2018.529.pdf

Reference34 articles.

1. G. Kaur, N. Dwivedi, X. Zheng, B. Liao, L. Z. Peng, A. Danner, R. Stangl, and C. S. Bhatia, IEEE J. Photovolt. 7, 1224 (2017).

2. W. Peng, S. M. Rupich, N. Shafiq, Y. N. Gartstein, A. V. Malko, and Y. J. Chabal, Chem. Rev. 115, 12764 (2015).

3. D. A. Muller, T. Sorsch, S. Moccio, F. H. Baumann, K. Evans-Lutterodt, and G. Timp, Nature 399, 758 (1999).

4. W. Kern and D. A. Puotinen, RCA Rev. 31, 187 (1970).

5. E. Yablonovitch, D. Allara, C. C. Chang, T. Gmitter, and T. B. Bright, Phys. Rev. Letts. 57, 249 (1986).

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