Author:
Kaan Kalkan A.,Kingi Reece M.,Fonash Stephen J.
Abstract
ABSTRACTDopant activation for ion implanted solid phase crystallized (SPC) a-Si:H films, deposited by low temperature PECVD, was investigated. The impact of film thickness, the effect of subsequent hydrogenation, and a possible role for fluorine in this process have been studied.
Publisher
Springer Science and Business Media LLC
Cited by
1 articles.
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