Growth of Single Crystal Tungsten Nanorods by Oblique Angle Sputter Deposition

Abstract

ABSTRACTWe report the creation of single crystal tungsten nanorods with unusual simple cubic β-phase. These novel nano-structures were grown by oblique angle sputter deposition with substrate rotation through a shadowing effect. Transmission electron microscopy (TEM) diffraction patterns from individual nanorods clearly show the single crystal structure. It is evident from TEM diffraction measurements, during the oblique angle deposition, both β-phase W(100) and α-phase W(110) islands exist at the initial stages of growth. However, at later stages of the growth the β-phase structure dominates. This is in contrast to the sputter deposition at normal incidence where only the thermodynamically stable bcc α-phase W(110) polycrystalline films were formed when the film grew to a certain thickness. We explain our results by using the shadowing and adatom mobility mechanisms: At the initial stages of growth, the β-phase W(100) islands grow taller due to the lower adatom mobility on these islands. The taller β-phase W(100) islands survive in the competition during oblique angle growth and form isolated nanorods in the later stages, while the shorter α-phase W(110) islands stop growing due to the shadowing effect. In addition, our Monte Carlo simulation results agree well with the experimental measurements.