Cathodoluminescence Studies of Thermal Stress in Patterned GaAs/Si

Abstract

ABSTRACTThermal stress distributions in patterned GaAs/Si are studied by low temperature cathodoluminescence spectroscopy. The MOCVD-grown samples have ben patterned in the form of stripes either by selective etching or by selective GaAs/Si growth using a SiO2 mask. In this work, the relevant stress components are determined as functions of position for stripes with different width to thickness ratios from low temperature (10 K) GaAs cathodoluminescence spectra and the results are discussed in comparison with finite element elastic calculations.