Author:
Heszler P.,Mogyorósi P.,Carlsson J.O.
Abstract
AbstractThe origin of the ArF excimer laser induced luminescence from a WF6/H2/Ar gas mixture was investigated. The experiments prove that the emission originates from excited W clusters with a size of about 10-20 nm. The influence of the H2 and Ar concentrations, the laser fluence and the repetition rate on the light intensity was studied.
Publisher
Springer Science and Business Media LLC
Reference4 articles.
1. Localized laser chemical processing of tungsten films
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4. 2. Willwohl H. , Wolfrum J. : Appl. Surf. Sci. in press
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