Laser Rapid Sintering of Metallo-Organic Derived Oxide Films

Abstract

AbstractOxide films of ZrO2, Y2O3, yttria stabilized zirconia (YSZ), and high Tc superconducting YBa2Cu3O7-x and Bi-Sr-Ca-Cu-O films were produced by spin coating metallo-organic precursors onto Si, ZrO2 and MgO single crystal substrates. Densification of these oxide films, after pyrolysis of organic constituents, was achieved by scanning a Nd:YAG laser beam across the film surface. Surface morphology, microstructures, spatial grain size distribution, compositional variations, defects and physical properties of laser sintered films were characterized using SEM, EDS, TEM, SIMS, XRD and 4-point electrical resistivity probe. Laser processing parameters, deposited film thickness and organic burn-off showed strong influences on the film densification behavior. This paper focuses on pursuing optimum conditions for obtaining dense, uniform sintered patterns in oxide films and on understanding the film-substrate interaction and dynamics of nucleation and growth via the laser rapid sintering process.