Author:
Meunier M.,Lavoie C.,Boivin S.,Izquierdo R.,Desjardins P.,Najafi S. I.
Abstract
AbstractThe deposition of titanium lines by KrF excimer laser direct writing on lithium niobate (LiNbO3) has been investigated. A detailled study of the line profile has been performed since this is critical in the fabrication of Ti:LiNbO3 optical waveguides. We show that at a low power density E, the maximum thickness t is proportional to E, while increasing E leads to the diffusion of Ti into LiNbO3 resulting in a saturation and even a decrease in thickness. Preliminary results on Ti:LiNbO3 optical waveguides show that their characteristics are similar to those made by conventional methods.
Publisher
Springer Science and Business Media LLC
Reference9 articles.
1. [7] Lavoie C. , Meunier M. , Boivin S. , Izquierdo R. and Desjardins P. , submitted to Journal of Applied Physics.
2. [5] Lavoie C. , Master thesis, Ecole Polytechnique de Montréal, 1990.
3. [4] Boivin S. , Lavoie C. , Izquierdo R. , Najafi S.I. and Meunier M. , IEEE Proc. (To be published).
4. Photodeposition of Ti and application to direct writing of Ti:LiNbO3waveguides
5. Excimer laser direct writing of titanium lines on lithium niobate