Fast and Automatic Control of a Frequency-Tuned Radiofrequency Plasma Source-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Fast and Automatic Control of a Frequency-Tuned Radiofrequency Plasma Source

Published:2020-01-23 Issue: Volume:7 Page:
ISSN:2296-424X
Container-title:Frontiers in Physics
language:
Short-container-title:Front. Phys.

Author:

Takahashi Kazunori,Hanaoka Kengo,Ando Akira

Publisher

Frontiers Media SA

Subject

Physical and Theoretical Chemistry,General Physics and Astronomy,Mathematical Physics,Materials Science (miscellaneous),Biophysics

Reference25 articles.

1. Review of inductively coupled plasmas for plasma processing;Hopwood;Plasma Sources Sci Technol.,1992

2. Plasma etching: yesterday, today, and tomorrow;Donnelly;J Vac Sci Technol A.,2013

3. Plasmas for spacecraft propulsion;Charles;J Phys D Appl Phys.,2009

4. Helicon-type radiofrequency plasma thrusters and magnetic plasma nozzles;Takahashi;Rev Mod Plasma Phys.,2019

5. First beam extraction experiments at BATMAN Upgrade;Kraus;AIP Conf Proc.,2018

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. 50 Years of Reactive Ion Etching in Microelectronics;IEEE Transactions on Materials for Electron Devices;2024

2. Magnetic Nozzle Radiofrequency Plasma Systems for Space Propulsion, Industry, and Fusion Plasmas;Plasma and Fusion Research;2023-06-30

3. Modification in cellulose films through ascent cold plasma treatment and polymerization for food products packaging;Trends in Food Science & Technology;2023-04

4. Characterization of a 2 MHz-radiofrequency-driven magnetically expanding plasma source;AIP Advances;2022-09-01

5. Automatically Controlled Frequency-Tunable rf Plasma Thruster: Ion Beam and Thrust Measurements;Frontiers in Physics;2021-03-31

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3