Resist Filling Study for UV Nanoimprint Lithography Using Stamps with Various Micro/Nano Ratios
Author:
Publisher
MDPI AG
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
Link
http://www.mdpi.com/2072-666X/9/7/335/pdf
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1. Light-Trapping and Interface Morphologies of Amorphous Silicon Solar Cells on Multiscale Surface Textured Substrates
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3. Fabrication of micro/nano fluidic channels by nanoimprint lithography and bonding using SU-8
4. A low-cost method of fabricating hybrid micro-nano fluidic chip by double-layer PDMS mold and UV–thermal nanoimprinting
5. UV nanoimprint lithography of sub-100nm nanostructures using a novel UV curable epoxy siloxane polymer
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