Integrated Temperature and Hydrogen Sensors with MEMS Technology
Author:
Publisher
MDPI AG
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Link
http://www.mdpi.com/1424-8220/18/1/94/pdf
Reference16 articles.
1. Preparation and characterization of Pd/Ni thin films for hydrogen sensing
2. Hydrogen sensors – A review
3. The palladium-hydrogen system: Structures near phase transition and critical points
4. Chemical and structural components of work function changes in the process of palladium hydride formation within thin Pd film
5. Pd/PVDF thin film hydrogen sensor system based on photopyroelectric purely-thermal-wave interference
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1. Thermal-assisted resistive sensor based on the PdCr alloy thin film for sensitive detection of hydrogen isotopes in helium atmosphere;International Journal of Hydrogen Energy;2024-02
2. High durability for PdNi nano-film hydrogen sensor;International Journal of Hydrogen Energy;2024-01
3. MEMS-Based Hydrogen Sensors: A State of the Art Review;2023 International Interdisciplinary PhD Workshop (IIPhDW);2023-05-03
4. A temperature-stable Pd nanofilm hydrogen sensor with a Wheatstone bridge structure;Journal of Materials Science: Materials in Electronics;2023-03
5. Effect of annealing treatment on response characteristics of Pd-Ni alloy based hydrogen sensor;Surfaces and Interfaces;2023-02
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