Sensing of Oxygen Partial Pressure in Air with ZnO Nanoparticles

Abstract

The demand for sensors in response to oxygen partial pressure in air is increasingly high in recent years and small-size sensors on a micrometer scale and even a nanometer scale are particularly desirable. In this paper, the sensing of oxygen partial pressure in air was realized by a solution-processed ZnO nanoparticle (NP). Thin-film ZnO NP was prepared by spin-coating and a highly sensitive sensor was then fabricated. The oxygen sensing performance was characterized in air and compared with that in nitrogen, which showed an increase in electrical conductance by more than 100 times as a result of decreasing oxygen partial pressure from 103 mBar to 10−5 mBar. Moreover, higher sensitivity was achieved by increasing the annealing temperature and the effect of thermal annealing was also investigated. Furthermore, ZnO NP lines with 7 μm in width were successfully patterned with low cost by a mould-guided drying technique from ZnO NP dispersion, which makes ZnO NP extremely promising for miniaturized and integrated sensing applications.