1. Department of Electric and Energy, Mus Alparslan University, Mus 49210, Turkey
2. Department of Mechatronic, Mus Alparslan University, Mus 49210, Turkey
3. Department of Mechatronic Engineering, Marmara University, Istanbul 34722, Turkey
4. Institute of Microtechnology, Technische Universität Braunschweig, Alte Salzdahlumer Straße 203, 38124 Braunschweig, Germany
5. Fakultät Maschinenbau, Ostfalia University, Salzdahlumer Straße 48, 38302 Wolfenbüttel, Germany