1. Laboratory for Biomedical Microtechnology, Department of Microsystems Engineering (IMTEK), University of Freiburg, 79110 Freiburg, Germany
2. BrainLinks BrainTools, Institute for Machine-Brain Interfacing Technology (IMBIT), University of Freiburg, 79110 Freiburg, Germany
3. Bernstein Center Freiburg, University of Freiburg, 79104 Freiburg, Germany