1. Department of Quantum Metrology, Institute for Quantum Technologies, German Aerospace Center (DLR e.V.), 2022 Wilhem-Runge-Straße 10, 89081 Ulm, Germany
2. Institute for Microelectronics, University of Ulm, 2022 Albert-Einstein-Allee 43, 89081 Ulm, Germany
3. Kharkiv Polytechnic Institute, National Technical University, 2 Kyrpychova Str., 61002 Kharkiv, Ukraine