Single-Walled Carbon Nanotube Synthesis Yield Variation in a Horizontal Chemical Vapor Deposition Reactor

Abstract

The controlled synthesis of single-walled carbon nanotubes (SWNTs) is essential for their industrial application. This study investigates the synthesis yield of SWNTs, which depends on the positions of the samples on a horizontal chemical vapor deposition (CVD) system. Methane and Fe thin films were used as the feedstock and catalyst for SWNTs synthesis, respectively. A high-resolution scanning electron microscope was used to examine the synthesis yield variation of the SWNTs along the axial distance of the reactor. The morphology and crystallinity of the fabricated SWNTs were evaluated by atomic force microscopy and Raman spectroscopy, respectively. We observed that the highest synthesis yield of the SWNTs was obtained in the rear region of the horizontal reactor, and not the central region. These results can be applied to the synthesis of various low-dimensional nanomaterials, such as semiconducting nanowires and transition metal dichalcogenides, especially when a horizontal CVD chamber is used.