1. Institute of Microengineering and Nanoelectronic (IMEN), Universiti Kebangsaan Malaysia (UKM), Bangi 46300, Selangor, Malaysia
2. Centre of Foundation Studies, Universiti Teknologi MARA, Cawangan Selangor, Kampus Dengkil, Dengkil 43800, Selangor, Malaysia
3. Research Center for Advanced Materials, National Research and Innovation Agency (BRIN), South Tangerang 15314, Banten, Indonesia