1. State Key Laboratory of Solidification Processing, Key Laboratory of Radiation Detection Materials and Devices, School of Materials Science and Engineering, Northwestern Polytechnical University, Xi’an 710072, China
2. School of Microelectronics, Xi’an Jiaotong University, Xi’an 710049, China
3. The Key Laboratory of Micro-Nano Electronics and System Integration of Xi’an City, Xi’an 710049, China