1. Institute of Materials Science and Engineering, National Taiwan University, Taipei 106, Taiwan
2. Department of Mechanical Engineering, National Taiwan University of Science and Technology, Taipei 106, Taiwan
3. Department of Materials Engineering and Center for Plasma and Thin Film Technologies, Ming Chi University of Technology, New Taipei City 243, Taiwan
4. Mechanical Engineering Department, Faculty of Engineering and Quantity Surveying, INTI International University, Nilai 71800, Negeri Sembilan, Malaysia
5. College of Engineering and Center for Green Technology, Chang Gung University, Taoyuan 333, Taiwan