1. Institute of Biomedical Systems, National Research University of Electronic Technology, 124498 Moscow, Russia
2. Institute for Bionic Technologies and Engineering, I.M. Sechenov First Moscow State Medical University, Bolshaya Pirogovskaya Street 2-4, 119991 Moscow, Russia
3. Scientific-Manufacturing Complex “Technological Centre”, Shokin Square 1, bld. 7 off. 7237, 124498 Moscow, Russia
4. Center for Probe Microscopy and Nanotechnology, National Research University of Electronic Technology, 124498 Moscow, Russia