1. Institute of Basic Sciences, Kemerovo State University, Kemerovo 650000, Russia
2. Research and Development Department, Kemerovo State University, Kemerovo 650000, Russia
3. Laboratory of Optical Materials and Structures, Institute of Semiconductor Physics, SB RAS, Novosibirsk 630090, Russia
4. Department of Applied Physics, Novosibirsk State University, Novosibirsk 630090, Russia
5. Department of Industrial Machinery Design, Novosibirsk State Technical University, Novosibirsk 630073, Russia
6. R&D Center “Advanced Electronic Technologies”, Tomsk State University, Tomsk 634034, Russia