A Small-Displacement Sensor Using Total Internal Reflection Theory and Surface Plasmon Resonance Technology for Heterodyne Interferometry
Author:
Publisher
MDPI AG
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Link
http://www.mdpi.com/1424-8220/9/4/2498/pdf
Reference15 articles.
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2. Polarization interferometer for measuring small displacement;Liu;IEEE Trans. Instrum. Meas,2001
3. A new method for measuring a small displacement by using the critical angle method and confocal technology;Liao;SPIE,2005
4. Small absolute distance measurement with nanometer resolution using geometrical optics principles and a SPR angular sensor;Chiu;Sens. Act. A,2008
5. Principles of Optics;Born,1980
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