High-Throughput Micro-Combinatorial TEM Phase Mapping of the DC Magnetron Sputtered YxTi1−xOy Thin Layer System
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Published:2024-05-24
Issue:11
Volume:14
Page:925
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ISSN:2079-4991
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Container-title:Nanomaterials
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language:en
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Short-container-title:Nanomaterials
Author:
Olasz Dániel12, Kis Viktória13, Cora Ildikó1, Németh Miklós4ORCID, Sáfrán György1
Affiliation:
1. Institute for Technical Physics and Materials Science, HUN-REN Centre for Energy Research, Konkoly-Thege Miklós út 29-33, 1121 Budapest, Hungary 2. Department of Materials Physics, Eötvös Loránd University, 1518 Budapest, Hungary 3. Department of Mineralogy, Eötvös Loránd University, Pázmány Péter sétány 1/c, 1117 Budapest, Hungary 4. Surface Chemistry and Catalysis Department, HUN-REN Centre for Energy Research, Hungarian Academy of Sciences, Konkoly-Thege Miklós út 29-33, 1121 Budapest, Hungary
Abstract
High-throughput methods are extremely important in today’s materials science, especially in the case of thin film characterization. The micro-combinatorial method enables the deposition and characterization of entire multicomponent thin film systems within a single sample. In this paper, we report the application of this method for the comprehensive TEM characterization of the Y-Ti-O layer system. Variable composition samples (YxTi1−xOy) were prepared by dual DC magnetron sputtering, covering the entire (0 ≤ x ≤ 1) concentration range. The structure and morphology of phases formed in both as-deposited and annealed samples at 600, 700, and 800 °C were revealed as a function of Y-Ti composition (x). A comprehensive map showing the appropriate amorphous and crystalline phases, and their occurrence regions of the whole Y-Ti-O layer system, was revealed. Thanks to the applied method, it was shown with ease that at the given experimental conditions, the Y2Ti2O7 phase with a pyrochlore structure forms already at 700 °C without the TiO2 and Y2O3 by-phases, which is remarkably lower than the required temperature for most physical preparation methods, demonstrating the importance and benefits of creating phase maps in materials science and technology.
Funder
Ministry of Culture and Innovation of Hungary National Research, Development and Innovation Fund Hungarian Scientific Research Fund OTKA European Structural and Investment Funds
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