1. Department of Energy and Materials Engineering, Dongguk University, Seoul 04620, Republic of Korea
2. Plasma Convergence R&BD Division, Cheorwon Plasma Research Institute, 1620, Hoguk-ro, Galmal-eup, Cherwon-gun 24047, Gangwon-do, Republic of Korea
3. KBSI Western Seoul Center, University-Industry Cooperation Building, 150 Bugahyeon-ro, Seodaemun-gu, Seoul 03759, Republic of Korea
4. Department of Chemistry, Hankuk University of Foreign Studies, Yongin 17035, Gyeonggi-do, Republic of Korea