Abstract
High entropy metal sub-lattice stabilized nitride coatings based on multicomponent refractory transition metals (TM = Ti, Nb, V, Ta, Zr, Hf) are promising candidates for extreme conditions due to their high thermal, mechanical, and corrosion properties. The aims of the current work included the investigations of the possibilities of the novel High Target Utilization Sputtering (HiTUS) technique applied to reactive sputtering of TiNbVTaZrHf–xN coatings from the viewpoints of hysteresis behavior during reactive sputtering as well as the structure, composition, stoichiometry, and mechanical properties of the resulting coatings. With increasing nitrogen content, coating structures varied from amorphous in metallic alloy coatings to textured nano-columnar fcc structures. Despite certain deviations of TM from equiatomic concentrations, homogeneous solid solutions corresponding to single-phase multicomponent nitride analogous to high entropy stabilized compounds were obtained. Mechanical properties were found to be proportional to nitrogen content. The highest hardness HIT ~ 33 GPa and indentation modulus EIT ~ 400 GPa were found in a slightly sub-stoichiometric (~42 at% nitrogen) composition. HIT/EIT and limited pillar split measurements suggested that these coatings exhibit low fracture toughness (around 1 MPa.m1/2). The work confirmed that reactive HiTUS is suitable for the preparation of multicomponent nitrides with the control of their stoichiometry and mechanical properties only via nitrogen additions.
Funder
Slovak Research and Development Agency
Research Centre of Advanced Materials and Technologies for Recent and Future Applications
Advancement and support of R&D
Scientific and Research Centre of Excellence SlovakION for Material and Interdisciplinary Research
Advancing University Capacity and Competence in Research, Development a Innovation
Subject
General Materials Science
Cited by
3 articles.
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