Highly Efficient Nano-Porous Polysilicon Solar Absorption Films Prepared by Silver-Induced Etching

Abstract

Nano-porous polysilicon high-temperature resistant solar absorption films were prepared by a thin layer of silver nanoparticles catalytic chemical etching. The polysilicon films with average tiny grain size of approximately 30 nm were obtained by high-temperature 800 °C furnace annealing of hydrogenated amorphous silicon films that were deposited on stainless substrate by plasma-enhanced chemical vapor deposition. The uniformly distributed 19 nm sized silver nanoparticles with 8 nm interspacing deposited on poly-Si film, were controlled by thin 4 nm thickness and very slow deposition rate 0.4 nm/min of thermal evaporation. Small silver nanoparticles with short spacing catalyzes the detouring etching process inducing the nano-porous textured surface with deep threaded pores. The etching follows the trail of the grain boundaries, and takes a highly curved thread like structure. The etching stops after reaching a depth of around 1100 nm, and the rest of the bulk thickness of the film remains mostly unaffected. The structure consists of three crystal orientations (111), (220), and (331) close to the surface. This crystalline nature diminishes gradually in the bulk of the film. High absorbance of 95% was obtained due to efficient light-trapping. Hence, preparation of nano-porous polysilicon films by this simple method can effectively increase solar absorption for the receiver of the solar thermal electricity Stirling Engine.